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| Keywords: Interferometer Sensor (13586351105).jpg Nicholas Dagalakis and Yong-sik Kim developed an interferometer sensor that uses a laser to measure the displacement of moving objects with high precision This invention has proven to be particularly useful for tracking moving parts in microelectromechanical systems MEMS devices See also http //www nist gov/director/patents-032614 cfm www nist gov/director/patents-032614 cfm Credit NIST Disclaimer Any mention of commercial products within NIST web pages is for information only; it does not imply recommendation or endorsement by NIST Use of NIST Information These World Wide Web pages are provided as a public service by the National Institute of Standards and Technology NIST With the exception of material marked as copyrighted information presented on these pages is considered public information and may be distributed or copied Use of appropriate byline/photo/image credits is requested https //www flickr com/photos/usnistgov/13586351105/ Interferometer Sensor 2014-03-25 14 35 https //www flickr com/people/63059536 N06 National Institute of Standards and Technology PD-USGov National Institute of Standards and Technology https //flickr com/photos/63059536 N06/13586351105 2016-09-07 01 53 12 United States Government Work Uncategorized 2016 November 3 | ||||
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